839-13521-1 MKS HPS 角隔离阀

839-13521-1 MKS HPS 角隔离阀

概述:

MKS HPS 角隔离阀是一种高性能、精密的气体控制阀，适用于各种真空和压力应用。该阀门具有以下特点：

高流量: 允许高流量，即使在高压下也是如此。

低泄漏: 泄漏率低，可确保系统清洁度和真空度。

快速响应: 响应速度快，可实现精确的流量控制。

多种配置: 提供多种配置，以满足各种应用需求。

技术规格:

型号: 839-13521-1

阀门类型: 角隔离阀

材质: 316L 不锈钢

压力等级:真空至 100 bar （1450 psi）

温度等级： -185°C 至 +200°C （-300°F 至 +400°F）

最大流速： 100 slpm （标准升每分钟）

泄漏率： < 10^-9 mbar l/s

响应时间： < 10 毫秒

接口： CF （ConFlat）

控制方式： 手动或气动

应用:

MKS HPS 角隔离阀适用于各种真空和压力应用，包括：

半导体制造:用于气体分配、真空系统和刻蚀工艺。

分析仪器:用于气体分析、真空系统和质谱仪。

光学涂层:用于气体分配和真空系统。

研发:用于各种气体控制应用。

优势:

MKS HPS 角隔离阀具有以下优势：

高性能:提供高流量、低泄漏和快速响应。

可靠性:由高质量材料制成，可确保长期可靠运行。

易用性:提供多种配置和控制方式，易于使用。

通用性:适用于各种真空和压力应用。

839-13521-1 MKS HPS 角隔离阀
Overview:

The MKS HPS Angle isolation valve is a high performance, precision gas control valve for a wide range of vacuum and pressure applications. The valve has the following features:

High flow rate: High flow rate is allowed, even at high pressure.

Low leakage: Low leakage rate to ensure system cleanliness and vacuum.

Fast response: Fast response speed enables accurate flow control.

Multiple configurations: Multiple configurations are available to meet various application requirements.

Technical specifications:

Model: 839-13521-1

Valve type: Angle isolation valve

Material: 316L stainless steel

Pressure rating: Vacuum to 100 bar (1450 psi)

Temperature rating: -185°C to +200°C (-300°F to +400°F)

Maximum flow rate: 100 slpm (standard litres per minute)

Leakage rate: < 10^-9 mbar l/s

Response time: < 10 ms

Interface: CF (ConFlat)

Control mode: manual or pneumatic

Applications:

MKS HPS Angle isolation valves are suitable for a variety of vacuum and pressure applications, including:

Semiconductor manufacturing: for gas distribution, vacuum systems and etching processes.

Analytical instruments: For gas analysis, vacuum systems and mass spectrometers.

Optical coatings: for gas distribution and vacuum systems.

R&d: For a variety of gas control applications.

Advantages:

The MKS HPS Angle isolation valve offers the following advantages:

High performance: Provides high flow, low leakage and fast response.

Reliability: Made of high-quality materials to ensure long-term reliable operation.

Ease of use: Provides a variety of configuration and control methods, easy to use.

Versatility: Suitable for a variety of vacuum and pressure applications.
839-13521-1 MKS HPS 角隔离阀